Theoretical analysis of the microrelief of typical machine-made surfaces by SEM photogrammetry

Abstract

The article analyzes digital elevation models (DEMs) of typical mechanically formed surfaces. The theoretical issues of 3D modeling of typical "ideal" surfaces obtained, for example, by artificially growing single crystals, forming regular microrelief of materials, etc. are considered. For this purpose, the most typical stepped, spherical, cylindrical, and cubic machined microrelief surfaces were selected. The algorithms for analytical photogrammetric and digital processing of SEM stereo images are presented and illustrated by relevant examples. The results of numerical integration for different surfaces are consistent with a typical "stepped" surface.